CDSEM(線寬檢測)
九一传媒公司制作网站半導體專注於半導體工藝設備的研發、製造、銷售及(jí)售後一體(tǐ)化服務,提供半導體廠商工藝(yì)設備的一站式解決方案。
關鍵詞:
半導體設備、半導體工藝
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產品描述
CD-SEMs (critical dimension scanning electron microscopes) are widely used as the main tool for CD measurement in semiconductor processes. In recent years they have helped in achieving improved precision for smaller design rules, and faster measurements for greater numbers of measurement points. New functions have also been implemented, such as automation of measurements through the effective utilization of design data, and measurement of hazardous locationss using positional information.
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